| 非球面超光滑加工磨头控制技术研究 |
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| 引用本文： | 刘健.非球面超光滑加工磨头控制技术研究[J].光学技术,2011,37(4):502-506. |
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| 作者姓名： | 刘健 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033 |
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| 基金项目： | 国家科技重大专项项目(2009ZX02205) |
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| 摘 要： | 为了避免在超光滑加工过程中破坏光学元件的原有面形,同时保证整个表面粗糙度的均匀一致,研究了超光滑加工过程中的磨头控制技术.首先分析了超光滑加工机床的结构形式及超光滑加工工艺特点；然后研究了非球面母线的双圆弧拟合算法以及磨头进给速度的控制方法；最后将所研究的磨头运动控制算法应用于超光滑加工控制软件.以顶点曲率半径为300...
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| 关 键 词： | 非球面 超光滑加工 磨头控制 非圆曲线 |
Study on polishing head control technology in aspheric supper smooth surface polishing |
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| LIU Jian.Study on polishing head control technology in aspheric supper smooth surface polishing[J].Optical Technique,2011,37(4):502-506. |
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| Authors: | LIU Jian |
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| Institution: | LIU Jian (The State Key Laboratory of Applied Optics,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130033,Jilin,China) |
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| Abstract: | Polishing head control technique of supper smooth polishing process is researched.In this method,optical element surface shape precision can be held invariant and surface roughness also can be held uniform.Firstly,supper smooth polishing machine structure and polishing technology character are analyzed.Then,double arc fitting algorithm of aspheric surface and polishing head control method are researched.Finally,polishing head motion control algorithm is applied supper smooth polishing technique software.The parabolic lens whose radius of curvature is 300mm and aperture is 200mm is taken as a special case,the generating line of parabolic lens is fitted,and error distribution and feed rate distribution are given.Corrective of algorithm is verified. |
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| Keywords: | aspheric supper smooth polishing polishing head control non-arc curve |
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