Optimization of collinear double-pulse femtosecond laser-induced breakdown spectroscopy of silicon |
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Authors: | John T. Schiffern David W. Doerr Dennis R. Alexander |
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Affiliation: | aCenter for Electro-Optics and Dept. of Electrical Engineering, University of Nebraska-Lincoln Lincoln, NE USA 68588-0511 |
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Abstract: | ![]() This paper investigates the optimization of double-pulse collinear femtosecond laser-induced breakdown spectroscopy (FLIBS) for silicon. Double-pulse FLIBS signal enhancements were observed over an extended range of sample focal plane position compared to single pulse FLIBS. The FLIBS signal intensity was studied as a function of pulse energy, inter-pulse delay (0 ps‑80 ps) and sample position. Correlation between crater volume and signal intensity was measured over a limited range of the sample focal plane position. It was found that double-pulse FLIBS is superior to single pulse for certain focal plane positions. |
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Keywords: | Femtosecond LIBS Laser-induced breakdown spectroscopy LIBS Dual-pulse LIBS Collinear dual-pulse LIBS Double-pulse LIBS |
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