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Optical design of high performance con-focal microscopy with digital micro-mirror and stray light filters |
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| Authors: | Chuan-Cheng Hung Cheng-Mu Tsai Koung-Ming Yeh |
| Affiliation: | a Department of Electronic Engineering, Kao Yuan University, 2Jhuoyue Road, Nanzih District, Kaohsiung City 811, Taiwan b Institute of Electro-Optical Engineering, Kaohsiung First University of Science and Technology, Taiwan c Department of Computer and Communication, Kun Shan University, No.949, Da Wan Rd., Yung-Kang City, Tainan Hsien 710, Taiwan d Metal Industries Research and Development Centre, Taiwan |
| Abstract: | This research proposes a newly developed stray light filter in order to eliminate stray light, which otherwise might severely reduce the performance of the con-focal microscopy presented in this research. First, an optical design for con-focal microscopy with a digital micro-mirror device (DMD) is illustrated; second, a newly developed stray light filter is presented, which functions to eliminate possible stray light and ghost images without any sacrifice of luminance. It indicates that not only can the optical system be much simplified but also that its resolution could be one step higher, because the system employs neither a pinhole nor a CCD camera lens. Experimental results are shown in the paper, demonstrating an increase in contrast of up to 60%. |
| Keywords: | Con-focal microscopy Surface profilometry Digital micro-mirror device (DMD) Surface inspection Stray light |
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