High-speed and crack-free direct-writing of microchannels on glass by an IR femtosecond laser |
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| Institution: | 1. Institute of Automation and Electrometry, Russian Academy of Science, Siberian Branch, 1 Acad Koptyuga Pr., 630090 Novosibirsk, Russian Federation;2. Novosibirsk State University, 2 Pirogova Str., 630090 Novosibirsk, Russian Federation;1. Dept. of Engineering Sciences and Mathematics, Luleå University of Technology, 971 87 Luleå, Sweden;2. Holo/Or Ltd., P.O.B 1051, Rehovot 76114, Israel;3. TWI Ltd., Granta Park, Great Abington, Cambridge CB21 6AL, United Kingdom;4. LAETA, IDMEC, Instituto Superior Técnico, Universidade de Lisboa, Lisboa 1049-001, Portugal;5. EWF, Porto Salvo 2740-120, Portugal;1. Department of Physics, University of Allahabad, Allahabad 211002, India;2. Department of Ancient History, Culture and Archaeology, University of Allahabad 211002 Allahabad, India;1. College of Engineering, PAF Karachi Institute of Economics and Technology (PAF KIET), Karachi, Pakistan;2. Department of Industrial Manufacturing Engineering and Management, PN Engineering College, National University of Sciences and Technology, PNS Jauhar, Karachi 75350, Pakistan;3. Department of Engineering Sciences, PN Engineering College, National University of Sciences and Technology, PNS Jauhar, Karachi 75350, Pakistan;1. Key Laboratory Equipment Design and Manufacturing Technology, School of Mechanical Engineering, Tianjin University, Tianjin 300054, China;2. School of Mechanical and Manufacturing Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan;3. Griffith School of Engineering, Gold Coast Campus, Griffith University, QLD 4222, Australia |
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| Abstract: | Fabrication of high-resolution 3D structures with laser radiation on the surface of brittle materials has always been a challenging task. Even with femtosecond laser machining, micro-cracks and edge chipping occur. In order to evaluate processing modes optimal both in quality and productivity, we investigated high-speed (50 kHz) femtosecond laser processing of BK7 glass with the use of design of experiments and regression analysis. An automated inspection technique was developed to extract quality characteristics of test-objects. A regression model was obtained appropriate to fabricate microchannels with a predefined depth in the range of 1–30 µm with average accuracy of 5%. It was found that high quality machining modes are in the range of 0.91–2.27 µJ energy pulses, overlap of 53–62%, three and more number of passes. A material removal rate higher than 0.3 mm3/min was reached and microfluidic structures were formed based on data obtained. |
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| Keywords: | Laser milling Femtosecond laser ablation Microchannels Automated inspection Design of experiments |
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