射频等离子体光源高效固态功率源的设计

针对射频等离子体光源(LEP)开发了一种较高抗负载失配能力的高效驱动功率源。采用三次谐波开 路和偶次谐波短路，并利用集总参数和分布参数相结合的拓扑结构，实现了谐波控制的高效 F 类功率放大器；利 用单片机控制固态源的工作频率，使其与光源谐振频率的变化一致，减小功放输出的驻波比，提高长期可靠性。 对高效固态功率源进行连续波满功率测试和等离子体光源的匹配性测试。结果表明，末级 F 类功放在 435~445MHz 频段内输出功率大于 200W，漏极效率 80.7%以上，功率源在等离子体光源工作频段内整体效率为 77.5%；与等离 子体光源谐振器的联合热测试中，系统光效为 86.21m·W^?1。

Design of high efficiency solid state power source for radiofrequency plasma light

A high efficiency driving power source with capability of withstanding high load mismatch has been developed for the radiofrequency(RF)light emitting plasma(LEP)sources.Considering open-circuit for the third harmonic and short-circuit termination for the voltage even harmonics,the circuit topology combining the lumped parameter and the distributed parameter is used to realize the high efficiency class F power amplifier with harmonic control.The working frequency controlled by the microcomputer follows the resonant frequency of the plasma light to achieve low voltage standing wave ratio(VSWR)for the output of the power amplifier,so that the long-term reliability is improved.Both the full power tests with continuous wave and matching test with the plasma light were carried out for the high efficiency solid state driving source.Results show that the output power of 200 W with the drain efficiency of 80.7%or more is achieved for the final stage class F power amplifier in the range of 435~445 MHz.The overall efficiency of the driving power source is 77.5%within the operating frequency range,and the system light efficacy is 86.21 m·W^-1in the joint test with the plasma light resonator.