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Plasma Enhanced Chemical Vapor Deposition of Poly(Cyclohexyl Methacrylate) as a Sacrificial Thin Film |
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| Authors: | Yartaşı Yunus Karaman Mustafa |
| Affiliation: | 1.Department of Chemical Engineering, Konya Technical University, 42031, Konya, Turkey ; |
| Abstract: | Plasma Chemistry and Plasma Processing - In this study, thin films of poly(cyclohexyl methacrylate) (PCHMA) were deposited on silicon wafer using PECVD technique, in which the plasma power is... |
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