On the Statistics of Nucleation of 3D Coherent Islands in Heteroepitaxy from a Molecular Beam

Within the framework of the cell method, the statistics of nucleation on the vertex of a 2D island is analyzed considering the influence of elastic stresses on the bond energy of an atom in a disruption. It is shown that elastic stresses at high temperatures may decrease the nucleation time as the temperature increases and the growth rate decreases. The results obtained agree qualitatively with the experimental data on the formation of 3D coherent islands in heteroepitaxy of semiconductors in molecular-beam epitaxy systems.