On the theory of the weighing method for automatic crystal shape control in czochralski growth |
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Authors: | Tom H Johansen |
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Institution: | Department of Physics, University of Oslo, Box 1048 Blindern, 0316, Oslo 3, Norway |
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Abstract: | We derive the exact analytical expression for the meniscus volume in terms of the crystal radius R, the melt contact angle θL, and the meniscus height h for the axisymmetric planar growth interface Czochralski configuration. This relation is applied together with motion and mass balance considerations to find the general rate of change in the force experience by the weighing cell in a standard diameter control arrangement. In contrast to the classical work of Bardsley et al. (1977), which is limited to the close viscinity of stationary right cylinder growth, our results are valid for growth developing any crystal profile. In addition, they also account for the fall of melt level due to finite crucible size. The magnitudes of the capillary contributions to the force, and their implications for diameter servo control, are discussed over a wide range of profile parameters using the Tsivinskii formula for h = h (R, θL). |
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