| Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity |
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| 作者单位： | State Key Laboratory of Precision Measuring Technology and Instruments，Tianjin University，Tianjin 300072，China |
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| 基金项目： | SupportedbytheNationalNaturalScienceFoundationofChinaunderGrantNo .
6 990 6 0 0 1andtheDoctoralFoundationoftheEducationCommitte |
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| 摘 要： | 1 Ｉｎｔｒｏｄｕｃｔｉｏｎ Ｉｎｔｈｅｅａｒｌｙ 1970ｓ ,ＰｈｉｌｉｐｓＣｏ .Ｌｔｄ .(Ｎｅｔｈｅｒｌａｎｄｓ)ｂｒｏｕｇｈｔｆｏｒｔｈａｎｏｖｅｌｍｏｕｎｔｔｅｃｈｎｏｌｏｇｙ—ＳＭＴ (ＳｕｒｆａｃｅＭｏｕｎｔＴｅｃｈｎｏｌｏｇｙ ) ,ｗｈｉｃｈｉｓｔｏｓｔｉｃｋｃｏｍｐｏｎｅｎｔｓａｎｄｓｏｌｄｅｒｉｎｇｐａｓｔｅｏｎａｐｒｉｎｔｅｄｂｏａｒｄｗｉｔｈｏｕｔｐｅｒｆｏｒａｔｉｏｎ .ＳＭＴ ｂａｓｅｄｉｎｔｅｇｒａｔｅｄｃｉｒｃｕｉｔｃｈｉｐ ,ｎａｍｅｌｙＳＭＩＣ ,ｉｎｃｌｕｄｉｎｇＢＧＡ(Ｂａｌ…
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| 收稿时间： | 1999/11/19 |
Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity |
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| SUN Changku,QIU Yu,XUE Xiaojie,YE Shenghua.Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity[J].中国激光(英文版),2000,9(5):417-422. |
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| Authors: | SUN Changku QIU Yu XUE Xiaojie YE Shenghua |
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| Abstract: | In this paper, a successful application of line structured laser sensor, involved in SMIC chip lead coplanarity measurement, is presented. With the experimental measurement system and its corresponding mathematics model, a contact datum plane assessment of SMIC chip lead coplanarity is developed to provide method for on line measurement. |
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| Keywords: | SMIC chip line structured laser coplanarity |
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