Experimental verification of a zero-dimensional model of the kinetics of XeCl* discharges by XeCl*(B)-, XeCl*(C)-, and Xe2Cl*-density measurements |
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Authors: | A Schwabedissen D Loffhagen T Hammer W Bötticher |
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Institution: | (1) Institut für Plasmaphysik, Universität Hannover, Callinstrasse 38, D-30167 Hannover, Germany;(2) Siemens AG, Corporate Research and Development, Plasma and Switching Technology, P.O.Box 3220, D-91050 Erlangen, Germany;(3) Present address: INP, Robert-Blum-Strasse 8-10, D-17489 Greifswald, Germany |
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Abstract: | Absolutely calibrated emission spectroscopy has been used to determine the particle number densities of XeCl*(B), XeCl*(C), and Xe2Cl* in a small scale Ne/Xe/HCl discharge with well-defined current and voltage pulses for a wide range of parameters. The measured particle number densities could be reproduced quite well by numerical model calculations using the rate-coefficient values of Quiñones et al. 1] for the quenching of XeCl*(B,C) by Ne, Xe, and 2Xe, but 3.0 × 10–31 cm6/s for the formation of Xe2Cl* by (Ne + Xe)-quenching. For the electron quenching, we recommend a rate coefficient value of 3.2 × 10–8 cm3/s. From the equilibrium ratio of the particle number densities of XeCl*(C) and XeCl*(B), the energy separation between these states has been estimated to be 72 ± 33 cm–1 with the B state placed above the C state. |
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Keywords: | 42 55 Gp 52 70 82 40 |
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