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Self-Consistent Model of an RF Inductive Plasma Source Located in an External Magnetic Field |
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| Authors: | A F Aleksandrov G E Bugrov I F Kerimova S G Kondranin E A Kralkina V B Pavlov V Yu Plaksin A A Rukhadze K V Vavilin |
| Institution: | (1) Physics Department, M. V. Lomonosov Moscow State University Vorob'evy Gory, Moscow, 119899, Russia;(2) Plasma Technology Co., Ltd., Korea;(3) Institute of General Physics, Russian Academy of Sciences Ul. Vavilova 38, Moscow, 119991, Russia |
| Abstract: | A theory for calculating plasma resistance and the RF power absorbed in an inductive plasma source is developed. Conditions are determined under which most of the power is absorbed by the plasma. It is shown that these conditions correspond to excitation of spatial waves (oblique Langmuir wave and helicon). A simple self-consistent model of the plasma source is proposed, which explains the specific features of the plasma sources experimentally observed. |
| Keywords: | IR inductive plasma source plasma resistance Trivelpiece– Gould wave helicon external magnetic field |
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