Characterization of microstructures induced in the workpiece of aluminum alloy by excimer laser micromachining |
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| Authors: | Ye Wu Irene Ling Li Ling Fu Jian pang Zhai Shuang Chen Ruan |
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| Affiliation: | aShenzhen Key Lab of Laser Engineering, College of Electronic Science and Technology, Shenzhen University, Shenzhen 518060, China |
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| Abstract: | Excimer laser emitting at 248 nm is applied to produce microstructures on the surface of aluminum alloy. The surface morphology shows that hotspots and thermal fluidic structures both come to light. Two possible mechanisms of hotspots formation are proposed: near-field diffraction and interference, and extremely fast rapid thermal annealing. And for the formation of thermal fluidic pattern structure, a thin film model is applied. |
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| Keywords: | Excimer laser micromachining Aluminum |
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