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High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth
引用本文:黄社松,牛智川,詹锋,倪海桥,赵欢,吴东海,孙征. High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth[J]. 中国物理 B, 2008, 17(1): 323-327
作者姓名:黄社松  牛智川  詹锋  倪海桥  赵欢  吴东海  孙征
作者单位:State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China;State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China;The Key Laboratory of Beam Technology and MaterialModification of Ministry of Education,Beijing Normal University,Beijing 100875, China;State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China;State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China;State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China;State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China
基金项目:Project supported by the NationalNatural Science Foundation of China (Grant No 60625405), and theSpecial Foundation for State Major Basic Research Program of China(Grant No 2006CB921504).
摘    要:


关 键 词:分子束外延 量子点 两步生长 量子学
收稿时间:2007-04-10
修稿时间:2007-07-04

High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth
Huang She-Song,Niu Zhi-Chuan,Zhan Feng,Ni Hai-Qiao,Zhao Huan,Wu Dong-Hai and Sun Zheng. High-density and narrow size-distribution InAs quantum dots formed by a modified two-step growth[J]. Chinese Physics B, 2008, 17(1): 323-327
Authors:Huang She-Song  Niu Zhi-Chuan  Zhan Feng  Ni Hai-Qiao  Zhao Huan  Wu Dong-Hai  Sun Zheng
Affiliation:State Key Laboratory for Superlattices andMicrostructures, Institute of Semiconductors,Chinese Academy ofSciences, Beijing 100083, China; The Key Laboratory of Beam Technology and MaterialModification of Ministry of Education,Beijing Normal University,Beijing 100875, China
Abstract:
We develop a modified two-step method of growing high-density andnarrow size-distribution InAs/GaAs quantum dots (QDs) by molecularbeam epitaxy. In the first step, high-density small InAs QDs areformed by optimizing the continuous deposition amount. In the secondstep, deposition is carried out with a long growth interruption forevery 0.1 InAs monolayer. Atomic force microscope images show thatthe high-density ($sim $5.9$times $10$^{10}$,cm$^{ - 2})$ goodsize-uniformity InAs QDs are achieved. The strong intensity andnarrow linewidth (27.7,meV) of the photoluminescence spectrum showthat the QDs grown in this two-step method have a good opticalquality.
Keywords:molecular beam epitaxy   quantumdots   a modified two-step growth
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