微流控芯片中超微电极的制作及其在芯片-电化学检测中的应用

设计并制作了集成有超微电极的玻璃微流控芯片.在电化学检测芯片1(EC-1)中,以光刻方法制作13μm宽的Pt超微电极,距分离管道末端30μm,优化电极体系和分离电压,检测了电泳分离的神经递质.在电化学检测芯片2(EC-2)中,制作7μm宽的超微电极,在其上游集成城墙式的膜结构,进一步腐蚀后的膜厚度为10μm,具有良好的导电性和散热性能,成功地将高压电场截至在超微电极之前,具有进一步应用于电化学检测的能力.

Fabrication of the Microfluidic Chips with Integrated Ultra-micro Electrodes and Its Application in On-chip Electrochemical Detection

Microfluidic glass chips with integrated ultra-micro electrodes were fabricated. In pattern EC-1, a 13-μm-wide platinum electrode was located photolithographically at the end of separation channel and extended 30 μm into the 6 mm wide detection reservoir. The electrode system and separation voltage were optimized, and neurotransmitters were detected after electrophoretic separation. In pattern EC-2, a 7-μm-wide platinum electrode with a battlement-like membrane structure were integrated in the chips. With post-etching procedure, the membrane width was reduced to 10 μm. With good electric conductivity and heat dissipation capability, the porous membrane successfully shields the high electric field before the ultra-micro electrode, which shows great possibility to apply in the on-chip electrochemical detection.