| 类金刚石薄膜光学常数拟合模型的合理性研究 |
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| 引用本文： | 李建超,苏俊宏,徐均琪.类金刚石薄膜光学常数拟合模型的合理性研究[J].应用光学,2004,25(5):56-59. |
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| 作者姓名： | 李建超 苏俊宏 徐均琪 |
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| 作者单位： | 西安工业学院,陕西省薄膜技术与光学检测重点实验室,陕西,西安,710032 |
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| 摘 要： | 由于椭偏光谱测量结果不能直接反映所测量样品材料的结构和光学性质，所以需要利用最小二乘法来拟合分析椭偏光谱数据得到光学常数。而椭偏光谱分析依赖于构建的模型，且可能存在多模型解，因此考虑模型的合理性就显得十分必要。本文采用椭偏法测量了类金刚石薄膜(DLC)的光学常数，分析并拟合了脉冲真空电弧离子技术镀制的类金刚石薄膜的椭偏光谱．获得了光学常数，并对拟合模型的合理性和测量结果的可靠性进行了分析。
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| 关 键 词： | 类金刚石薄膜 光学常数 模型 可靠性 |
| 文章编号： | 1002-2082(2004)05-0056-04 |
| 收稿时间： | 2004/7/20 |
Study of the Reasonableness of Fitting Model Concerning DLC Film Optical Constant |
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| LI Jian-chao,SU Jun-hong,XU Jun-qi.Study of the Reasonableness of Fitting Model Concerning DLC Film Optical Constant[J].Journal of Applied Optics,2004,25(5):56-59. |
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| Authors: | LI Jian-chao SU Jun-hong XU Jun-qi |
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| Institution: | Xi'an Institute of Technology, Shaanxi Province Thin Film Technology and Optical Test Key Lab, Xi'an 710032, China |
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| Abstract: | The measurement results of spectroscopic ellipsometry(SE) can not directly reflect the structure and optical properties of the tested samples, so the least square method for fitting the measurement data is needed, and the interpretation of the SE results is model dependent. Usually the fitting results are not only one. Thus, taking into account of the reasonableness of fitting model is important. The reasonableness of the model concerning DLC film's optical constant is studied with the ellipsometry in this paper. We analyzed and fit the optical constant of the DLC film deposited by pulse ion source, and investigated the reasonableness of the fitting model and reliability of the fitting result. |
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| Keywords: | DLC film optical constant model reliability |
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