Moiré displacement measurement technique for a linear encoder |
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Authors: | K. Hane Y. Uchida S. Hattori |
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Affiliation: | 1. KH and SH are in the Department of Electronic-Mechanical Engineering, Nagoya University, Chikusa-ku, Nagoya 464, Japan;2. YU is in the Department of Electronic-Mechanical Engineering, Nagoya University, Chikusa-ku, Nagoya 464, Japan |
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Abstract: | The light intensity diffracted from superimposed dual transmission gratings is sensitive to their relative lateral displacement but is also affected by changes in the air gap between them. Averaging the diffracted light intensities obtained in the gap range of a Fourier image distance, the resultant intensity was almost independent of the gap between the two gratings and had a period of half the pitch of the grating for the lateral displacement. This method can be used for a linear encoder in precision machining. |
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Keywords: | optics displacement measurement moiré fringes |
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