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| 光激励硅微机械谐振器的振幅分析及计算 | |
| 引用本文： | 刘月明,刘君华,张少君.光激励硅微机械谐振器的振幅分析及计算[J].光子学报,2001,30(1):99-103. |
| 作者姓名： | 刘月明 刘君华 张少君 |
| 作者单位： | 1. 西安交通大学电气测量教研室，710049 西安理工大学，710048 2. 西安交通大学电气测量教研室，710049 3. 西安理工大学，710048 |
| 基金项目： | The project supported by the National Nature Science Foundation of China(No.69776037) and Research Foundation of Education Department of Shaanxi Provinc (No.OOJK263) |
| 摘 要： | 分无镀膜(或镀膜很薄)和有较厚镀膜两种情况,对硅微谐振器的光激励振幅进行了分析计算.针对有较厚镀膜的硅微谐振器,在理论分析的基础上,提出了一种新的光激振幅计算模型,理论计算与实验测试值吻合得很好. |
| 关 键 词： | 硅微谐振器 光激励 振幅 |
| 收稿时间： | 2000-04-28 |
AMPLITUDE ANALYSIS OF OPTICALLY EXCITED SILICON MICRORESONATORS |
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| Liu Yueming.AMPLITUDE ANALYSIS OF OPTICALLY EXCITED SILICON MICRORESONATORS[J].Acta Photonica Sinica,2001,30(1):99-103. | |
| Authors: | Liu Yueming |
| Institution: | 1. Xi’an Jiaotong University, 710049;2. Xi’an University of Technology, 710048 |
| Abstract: | The analysis and calculation of the amplitude is given to theoptically excitedsilicon microresonators which have or haven′t films,and a new model is built to the microresonator with films based on the heat conducting theory,the thermal strain theory and the mechanical vibration theory.The comparison between the theoretical values and experimental values shows that the new model is more accurate. |
| Keywords: | Silicon microresonators Optical excitation Amplitude |
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