| 含氮类金刚石薄膜的力学和摩擦学性能的研究 |
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| 引用本文： | 王成兵,王舟,张俊彦. 含氮类金刚石薄膜的力学和摩擦学性能的研究[J]. 摩擦学学报, 2012, 32(1): 59-63 |
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| 作者姓名： | 王成兵 王舟 张俊彦 |
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| 作者单位： | 1. 兰州交通大学国家绿色镀膜技术与装备工程技术研究中心,甘肃兰州,730070
2. 中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州,730000 |
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| 基金项目： | 国家自然科学基金(51005110)、教育部博士点新教师基金(20096204120002)和中国博士后科学基金(20090450846)资助. |
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| 摘 要： | 利用脉冲等离子体增强化学气相沉积系统沉积了含氮类金刚石碳薄膜.利用X射线光电子能谱和红外光谱分析了薄膜的化学键状态,在UMT摩擦磨损试验机上考察了薄膜的摩擦学性能,利用扫描电子显微镜分析了摩擦对偶球表面的转移膜形貌.结果表明:随着薄膜中氮含量的增加,薄膜中的sp2C含量增加,硬度有所降低,薄膜的平均摩擦系数先减小后增加.
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| 关 键 词： | 类金刚石碳薄膜 掺氮 摩擦学 力学 |
Mechanical and Tribological Properties of Nitrogenated Diamond-like Carbon Films |
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| WANG Cheng-bing,WANG Zhou and ZHANG Jun-yan. Mechanical and Tribological Properties of Nitrogenated Diamond-like Carbon Films[J]. Tribology, 2012, 32(1): 59-63 |
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| Authors: | WANG Cheng-bing WANG Zhou ZHANG Jun-yan |
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| Affiliation: | National Engineering Research Center for Technology & Equipment of Green Coating, Lanzhou Jiaotong University, Lanzhou 730070, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China;State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
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| Abstract: | Nitrogenated diamond-like carbon films were deposited onto Si substrates by Pulse-DC Plasma Enhanced Chemical Vapor Deposition (PECVD) system. X-ray Photoelectron Spectroscopy (XPS), Fourier Transform Infrared (FTIR) spectrometer and Scanning Electron Microscope (SEM) were utilized to characterize bond configuration and chemical state of the films. Tribological properties were tested on a UMT reciprocating tribometer. As the nitrogen content of carbon nitride films increased, the sp2 C content increased and the hardness decreased, while the average coefficient of friction of carbon nitride films increased. |
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| Keywords: | diamond-like carbon nitrogenated tribology mechanical property |
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