Activation energy of water vapor and oxygen transmission through TiNxOy/PET gas barrier films |
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| Authors: | MC Lin L-S Chang |
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| Institution: | a Department of Materials Science and Engineering, National Taiwan University, 1, Roosevelt Road, Sec. 4, 106, Taipei, Taiwan/R.O.C
b Department of Materials Science and Engineering, National Chung Hsing University, 250, Kuo-Kuang Road, 40227, Taichung, Taiwan/R.O.C |
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| Abstract: | Titanium oxynitride (TiNxOy) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiNxOy films with a thickness of about 55 nm have similar contents of TiN, TiNxOy and TiO2 bonds, although they are deposited at different power densities. The TiNxOy films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiNxOy/PET films. |
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| Keywords: | Titanium oxynitride film Reactive magnetron sputtering Polyethylene terephthalate Gas permeation Activation energy |
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