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Oblique angle deposition of TiO2 thin films prepared by electron-beam evaporation |
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| Authors: | Min Wook Pyun Dae-Hwang Yoo |
| Affiliation: | a Department of Physics, University of Ulsan, Ulsan 680-749, South Korea b Department of Chemical Engineering, University of Ulsan, Ulsan 680-749, South Korea c Energy Harves-storage Research Center, University of Ulsan, Ulsan 680-749, South Korea |
| Abstract: | Optical, structural and photocatalytic properties of TiO2 thin films obliquely deposited on quartz glass substrate using an electron-beam evaporation method were investigated. The photocatalytic activity of the films was evaluated by photodecomposition of methylene blue. An increase in incident deposition angle increased the porosity and surface roughness of the TiO2 films. As a result, the photocatalytic activity was enhanced with incident deposition angle up to 60°. However, a further increase in incident deposition angle to 75° reduced the photocatalytic activity due to a lack of the crystalline phase. |
| Keywords: | E-beam evaporation Oblique angle deposition TiO2 thin film Photocatalytic activity |
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