Study of surface oxidation of iron foils by grazing incidence electron-induced X-ray emission spectroscopy

Surface oxidation of metallic iron was studied by grazing incidence electron-induced X-ray emission spectroscopy. We have shown the feasibility of the quantitative chemical-state analysis in the nanometer depth range on the basis of the results by Monte Carlo simulations in the grazing incidence setup. It is also found that the self-absorption effect is not negligible in the nanometer depth range.