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| 聚硅氧烷改性及多模光波导制备 | |
| 引用本文： | 冯向华,季家镕,窦文华.聚硅氧烷改性及多模光波导制备[J].光学学报,2012,32(5):531003-315. |
| 作者姓名： | 冯向华 季家镕 窦文华 |
| 作者单位： | 冯向华:国防科学技术大学光电科学与工程学院, 湖南 长沙 410073解放军信息工程大学理学院, 河南 郑州 450001 季家镕:国防科学技术大学光电科学与工程学院, 湖南 长沙 410073 窦文华:国防科学技术大学计算机学院, 湖南 长沙 410073 |
| 基金项目： | 国家973计划（2012CB933504）资助课题。 |
| 摘 要： | 采用含氢聚硅氧烷(HPSO)和二乙烯基苯(DVB)的交联体掺入聚二甲基硅氧烷(PDMS)中,使改性的聚二甲基硅氧烷(M-PDMS)折射率发生1%～1.8%的改变。M-PDMS及PDMS薄膜具有良好的光透射率和低的传输损耗,是低成本制备用于高速芯片间光互连聚合物光波导的理想材料。采用软成型和图案转移法,用M-PDMS及PDMS分别作波导的芯层和包层制备了截面为50μm×50μm,长度大于20cm的聚硅氧烷多模光波导。用数字化散射法测量了所制备波导的传输损耗,测得输入光波长为633nm时平均传输损耗为0.137dB/cm。 |
| 关 键 词： | 薄膜 芯片间光互连 聚硅氧烷波导 交联体 图案转移法 传输损耗 |
| 收稿时间： | 2011/11/21 |
Fabrication of Modified Polydimethylsiloxane and Multimode Optical Waveguides |
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| Feng Xianghua,Ji Jiarong,Dou Wenhua.Fabrication of Modified Polydimethylsiloxane and Multimode Optical Waveguides[J].Acta Optica Sinica,2012,32(5):531003-315. | |
| Authors: | Feng Xianghua Ji Jiarong Dou Wenhua |
| Institution: | 1College of Optoelectronic Science and Engineering,National University of Defense Technology, Changsha,Hunan 410073,China 2College of Computer,National University of Defense Technology,Changsha,Hunan 410073,China 3College of Science,Information Engineering University,Zhengzhou,Henan 450001,China) |
| Abstract: | The modified polydimethylsiloxane (M-PDMS) is synthesized by adulterating cross-linking of polysiloxane (HPSO) and divinylbenzene (DVB) into polydimethylsiloxane (PDMS). M-PDMS refractive index contrast PDMS are changed by 1%~1.8%. PDMS and M-PDMS bulk samples have well transmittance and low propagation loss. These benefits realize high productivity and low-cost mass production of large core multimode optical waveguides for optical interconnection. M-PDMS and PDMS are used for the core layer and the cladding layer. Large core(50 μm×50 μm) multimode optical waveguides are fabricated by the soft molding and simple replication, the length of waveguides is more than 20 cm. The optical propagation loss of waveguides is 0.137 dB/cm measured by digital scattering method at 633 nm. |
| Keywords: | thin films inter-chip optical interconnection polysiloxane waveguide cross-linking pattern transfer method propagation loss |
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