| LZ-50离子注入装置及其在材料表面改性中的应用 |
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| 引用本文： | 耿漫,陶士慧,段玉,钟溥,邵先华,王作民. LZ-50离子注入装置及其在材料表面改性中的应用[J]. 核聚变与等离子体物理, 1987, 0(4) |
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| 作者姓名： | 耿漫 陶士慧 段玉 钟溥 邵先华 王作民 |
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| 作者单位： | 西南物理研究所，西南物理研究所，西南物理研究所，西南物理研究所，西南物理研究所，西南物理研究所 四川 乐山，四川 乐山，四川 乐山，四川 乐山，四川 乐山，四川 乐山 |
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| 摘 要： | 本文叙述了LZ-50离子注入装置及其在材料表面改性中的应用。该装置离子能量80keV,氮离子束流强～10mA,注入面积～200cm~2,性能稳定,重复性好,可长期稳态运行。利用该装置对硬质合金、工具钢、钛合金、陶瓷及其它有色金属材料进行了氮离子注入实验,并取得了一些有应用价值的工艺结果,如离子注入使Co-WC机械夹固刀片的耐磨性能提高2—4倍。
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| 关 键 词： | 离子注入机 离子注入 材料表面改性 |
ION IMPLANTATION EQUIPMENT LZ-50 AND ITS APPLICATION TO MODIFICATION OF MATERIAL SURFACE PROPERTIES |
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| GENG Man TAO Shihui DUAN Yu ZHONG PuSHAO Xianhua WANG Zuomin. ION IMPLANTATION EQUIPMENT LZ-50 AND ITS APPLICATION TO MODIFICATION OF MATERIAL SURFACE PROPERTIES[J]. Nuclear Fusion and Plasma Physics, 1987, 0(4) |
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| Authors: | GENG Man TAO Shihui DUAN Yu ZHONG PuSHAO Xianhua WANG Zuomin |
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| Abstract: | An ion implantation equipment, LZ-50, has been built for applications of ion implantation to the improvement of properties of non-semiconducter materials. The beam energy is 80keV, nitrogen ion current 10mA, and implantation area up to 200cm2 . The equipment is characterized by high stability and good reproducibility, and can be operated in steady state. It has been used to perform experiments on ion implantation for carbide alloy, tool steel, alloy of titanium, ceramics and other non-ferrous metals. Some good results in industrial application have been obtained. For example, the lifetime of Co-WC clamped indexable inserts used in manufacture has been lengthened by a factor of 2-4. |
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| Keywords: | Ion implanter Ion implantation The modification of material surface properties. |
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