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A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist |
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| Authors: | A N Gentselev B G Gol’denberg E V Petrova V F Pindyurin A S Kozlov |
| Institution: | 1.Budker Institute of Nuclear Physics, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia;2.Institute of Chemical Kinetics and Combustion, Siberian Branch,Russian Academy of Sciences,Novosibirsk,Russia |
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