Self-guided glass drilling by femtosecond laser pulses |
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| Authors: | David J. Hwang Kuniaki Hiromatsu Hirofumi Hidai Costas P. Grigoropoulos |
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| Affiliation: | (1) Department of Mechanical Engineering, University of California, Berkeley, CA 94720-1740, USA;(2) Research Center, AGC ASAHI GLASS CO., LTD., Address 1-1, Suehiro-cho, Tsurumi-ku, Yokohama-shi, Kanagawa, Japan;(3) Department of Mechanical Sciences and Engineering, Tokyo Institute of Technology, Tokyo 152-8552, Japan;(4) Advanced Energy Technologies Department, EETD, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA |
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| Abstract: | Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements. |
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| Keywords: | KeywordHeading" >PACS 42.62.-b 42.70.Ce 82.50.Pt |
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