TFA-MOD法制备YBCO薄膜生长速率研究

采用原位电阻法对TFA-MOD法高温热处理阶段YBCO薄膜生长速率进行了研究。实验结果和分析表明原位电阻测量法是一种估算YBCO层生长速率的有效方法,不同条件下的测量结果表明薄膜生长速率随管式炉内的温度、水分压、气体流量的上升而明显增加,但随薄膜面积的增加而减小。实验结果为进一步探索和优化热处理过程提供了重要的基础。

Study on the growth rate of YBCO films prepared by TFA-MOD

This paper presented the investigation of YBCO film growth rate during high temperature firing process of TFA-MOD by in situ resistance measurements.The measurements appeared to be quite useful to evaluate the film growth rates based on the analysis,and with this method it was found that YBCO film growth rate increases obviously along with the increasing of temperature,water partial pressure and gas flow rate in the tube furnace,whereas it decreases as the film area increases.These results would be quite useful for further understanding and optimization of the firing process.