Ionization Cross Sections of Gas Molecules for Plasma Chemistry

Using the recently tested formula of Gryzinski electron impact ionization cross sections for several molecules are calculated. The additivity rule and the statistical approach by Fitch and Sauter are discussed. With new experimental ionization cross sections it is possible to derive the regression coefficients also for P, As, B, and Si, which are presented together with the previously obtained values as a function of the atomic number. It appears to be possible to obtain coefficients for other atoms by interpolation. First attemps to determine regression coefficients also for 20 and 35 eV electron energy are discussed.