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| 分层沉积GaAs/SiO2纳米薄膜的结构和吸收光谱 | |
| 引用本文： | 朱慧群,丁瑞钦,王忆,吴桐庆. 分层沉积GaAs/SiO2纳米薄膜的结构和吸收光谱[J]. 人工晶体学报, 2006, 35(3): 630-634 |
| 作者姓名： | 朱慧群 丁瑞钦 王忆 吴桐庆 |
| 作者单位： | 五邑大学薄膜与纳米材料研究所,江门,529020;华南理工大学物理科学与技术学院,广州,510641 |
| 基金项目： | 广东省自然科学基金(No.04011770)，广东省江门市科技计划基金(江财企2003.61)资助项目 |
| 摘 要： | 应用射频磁控溅射方法分别在抛光硅片和石英玻璃片上分层沉积了GaAs/SiO2纳米薄膜.通过X射线衍射(XRD)、原子力显微镜(AFM)、扫描电子显微镜(SEM)及吸收光谱的测试,发现衬底温度、退火、氢掺杂等制备工艺对分层沉积的GaAs/SiO2纳米薄膜的微观结构和光学性质有明显的影响.本文对相关机理作了探讨. |
| 关 键 词： | 射频磁控溅射 GaAs/SiO2纳米薄膜 氢掺杂 吸收光谱 |
| 文章编号： | 1000-985X（2006）03-0630-05 |
| 收稿时间： | 2006-02-20 |
| 修稿时间： | 2006-02-202006-03-20 |
Micro-structure and Absorption Spectra of Multi-layer Deposited GaAs/SiO2 Nano-films |
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| ZHU Hui-qun,DING Rui-qin,WANG Yi,WU Tong-qing. Micro-structure and Absorption Spectra of Multi-layer Deposited GaAs/SiO2 Nano-films[J]. Journal of Synthetic Crystals, 2006, 35(3): 630-634 | |
| Authors: | ZHU Hui-qun DING Rui-qin WANG Yi WU Tong-qing |
| Affiliation: | 1. Institute of Thin Films and Nanomaterials, Wuyi University, Jiangmen 529020, China; 2. College of Physics Science and Technology, South China University of Science and Technology, Guangzhou 510641 ,China |
| Abstract: | GaAs/SiO_2 films were deposited on the substrates of quartz glass and silicon slices layer by layer by radio frequency(RF) magnetron sputtering technique.The significant influences of substrate temperature,annealing and hydrogen doping technique on the crystal structure,morphology and optical properties of the GaAs/SiO_2 films were observed by X-ray diffraction,AFM and SEM and optical absorption spectrum.The related mechanisms of the experimental results were explained accordingly. |
| Keywords: | RF magnetron sputtering GaAs/SiO_2 nano-films hydrogen doping absorption spectrum |
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