Broadband Antireflection Subwavelength Gratings for Polymethyl Methacrylate Fabricated with Molding Technique |
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Authors: | Yoshiaki Kanamori Kazuhiro Hane |
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Institution: | (1) Department of Mechatronics and Precision Engineering, Tohoku University, Aoba-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan |
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Abstract: | We fabricated a two-dimensional subwavelength grating (SWG) on a polymethyl methacrylate (PMMA) film using a molding technique. A method of fabricating SWGs with high accuracy using a replica technique in an atmospheric environment was proposed. The SWG consisted of tapered gratings with a 200 nm period and a 200 nm deep groove. The reflectivity at wavelengths from 400 nm to 800 nm was measured and compared with the results calculated on the basis of rigorous coupled-wave analysis. At these wavelengths, the reflectivity decreased to approximately half that of the PMMA film. |
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Keywords: | subwavelength grating antireflection mold polymethyl methacrylate micromachining rigorous coupled-wave analysis |
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