| 甲烷浓度对CVD自支撑金刚石薄膜残余应力的影响 |
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| 引用本文： | 朱宏喜,毛卫民,吕反修,赵清坡,谢秋风.甲烷浓度对CVD自支撑金刚石薄膜残余应力的影响[J].人工晶体学报,2009,38(1):122-127. |
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| 作者姓名： | 朱宏喜 毛卫民 吕反修 赵清坡 谢秋风 |
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| 作者单位： | 河南科技大学材料科学与工程学院,洛阳,471003;河南省有色金属材料科学与加工技术重点实验室,洛阳,471003;北京科技大学材料科学与工程学院,北京,100083;河南科技大学材料科学与工程学院,洛阳,471003 |
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| 基金项目： | 国家自然科学基金，the Doctor Foundation of Henan University of Science and Technology，SRTP of Henan University of Science and Technology |
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| 摘 要： | 根据唯像理论研究了化学气相沉积自支撑金刚石薄膜中织构和弹性性能之间的关系,揭示了晶体取向和织构对残余应变和残余应力的影响.织构使CVD金刚石薄膜杨氏模量和宏观残余应变呈现各向异性,而且两者呈现相反的分布规律.织构和杂质都能影响金刚石薄膜的弹性模量和残余应变,但是织构的影响是主要的.实验中测量的残余应变很好的符合了根据薄膜织构计算得到的弹性模量值.因此可以借助改变薄膜织构来调节薄膜的残余应力.
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| 关 键 词： | 化学气相沉积 金刚石薄膜 织构 弹性模量 残余应力 |
Effect of Methane Concentration on the Residual Stress in CVD Free Standing Diamond Films |
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| ZHU Hong-xi,MAO Wei-min,LV Fan-xiu,ZHAO Qing-po,XIE Qiu-feng.Effect of Methane Concentration on the Residual Stress in CVD Free Standing Diamond Films[J].Journal of Synthetic Crystals,2009,38(1):122-127. |
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| Authors: | ZHU Hong-xi MAO Wei-min LV Fan-xiu ZHAO Qing-po XIE Qiu-feng |
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| Institution: | 1.School of Materials Science and Engineering;Henan University of Science and Technology;Luoyang 471003;China;2.Henan Key Laboratory of Advanced Non-ferrous Metals;3.School of MaterialsScience and Engineering;University of Science and Technology Beijing;Beijing 100083;China |
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| Abstract: | The relationship between texture and elastic properties of CVD diamond films was analyzed based on the phenomenological theory,which indicates the effect of crystalline orientation and texture on the residual strain and residual stress.The Young's modulus and residual strains in CVD diamond films are anisotropic and their distribution rules are opposite because of texture.Both texture and impurities can influence the Young's modulus and residual strains in CVD diamond films,in which texture plays a main rol... |
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| Keywords: | CVD diamond film texture Young' s modulus residual stress |
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