添加Y改善离子镀氮化钛膜的结构与性能

评价了离子镀氮化钛(TiN)和Y改性氮化钛(Ti(Y)N)膜的结合强度和在酸性介质中的耐蚀性能;用X射线衍射,离子探针质谱分析(IMA),透射电子显微镜(TEM)研究它们的显微结构特征;结果表明,添加Y元素富集在Ti(Y)N与A₃钢基材界面区域,并形成厚度约为20nm的亚层,Y的界面改性导致Ti(Y)N膜的X射线衍射线形略有宽化和明显的TiN相(111)面的择优生长取向;这些显微结构特征的改善导致Ti(Y)N膜比TiN膜具有更高的界面结合强度和更好的耐蚀性能。 关键词：

MODIFICATION OF MICROSTRUCTURE AND PROPERTIES OF ION PLATED TITANIUM NITRIDE FILM BY ADDING YTTRIUM

The microstructure and properties of ion plated titanium nitride film can be improved by adding rare earth element yttrium. Y-modified titanium nitride (Ti(Y)N) film exhibits an excellent corrosion resistance and binding strength to the substrate of A₃ steel. The microstructure characteristics of Ti(Y)N/A₃ system have been investigated by X-ray diffraction, ion probe mass analysis and cross section transmission electron microscopy. The results show that yttrium is enriched at the interface of Ti(Y)N/A₃ system and the modification of Y at the interface leads to a very good metallurgical transition band from the substrate to the film and the preferential orientation along close-packed TiN(lll) crystal plane, which may be the major reasons for the improvement of the properties of the Ti(Y)N film.