High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens |
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| Authors: | Long Gao Chunhui Wang Yiqin Ji Yanchao Li Yang Qu |
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| Institution: | (1) National Key Laboratory of Science and Technology on Tunable laser, Harbin Institute of Technology, Harbin, 150001, China;(2) Tianjin Key Laboratory of Optical Thin Films, Tianjin Jinhang Institute of Technical Physics, Tianjin, 300192, China |
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| Abstract: | This paper describes a novel fiber-coupled heterodyne interferometer using a micro-electro-mechanical system (MEMS) mirror
and an f-theta lens. In this interferometer system, the cross-polarized laser beams operating at 2 μm with the frequency difference
of 100 kHz are introduced by means of the two acousto-optic modulators (AOM). The sample with diameter of 300 mm is uniformly
scanned by the 1 mm laser beam with the help of the combined optical scanning configuration, a MEMS mirror and an f-theta
lens. The output intermediate signal from the two channels, reference channel and the measurement channel, are processed in
the 12 bit analog-to-digital (A/D) process system. Details of our interferometer scheme are discussed. |
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