| 点衍射干涉仪中小孔衍射波面误差分析 |
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| 引用本文： | 马强,刘伟奇,李香波,康玉思,魏忠伦,冯睿,柳华. 点衍射干涉仪中小孔衍射波面误差分析[J]. 光学学报, 2008, 28(12): 2321-2324 |
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| 作者姓名： | 马强 刘伟奇 李香波 康玉思 魏忠伦 冯睿 柳华 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林,长春,130033;中国科学院研究生院,北京,100039;中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林,长春,130033 |
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| 摘 要： | 针孔或光纤直径的大小是影响点衍射干涉仪检测精度的重要因素,在实际检测中须根据检测任务的精度要求来选择小孔的尺寸.基于标量衍射理论,仿真计算了小孔尺寸引起的衍射波面相对标准球面偏离的误差.结果表明,当小孔直径为2.5μm,数值孔径(NA)为0.3时,与小孔有关的光学系统误差峰值(PV)约为0.07 nm.仿真方法和计算结果为针对各种高精度面形检测任务而设计点衍射干涉仪和分析其精度提供了理论和数据参考.
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| 关 键 词： | 光学检测 点衍射干涉仪 标量衍射 衍射波面误差 |
| 收稿时间： | 2008-03-28 |
Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer |
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| Ma Qiang,Liu Weiqi,Li Xiangbo,Kang Yusi,Wei Zhonglun,Feng Rui,Liu Hua. Analysis of Diffraction Wavefront Error in Point Diffraction Interferometer[J]. Acta Optica Sinica, 2008, 28(12): 2321-2324 |
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| Authors: | Ma Qiang Liu Weiqi Li Xiangbo Kang Yusi Wei Zhonglun Feng Rui Liu Hua |
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| Affiliation: | Ma Qiang1,2 Liu Weiqi1 Li Xiangbo1,2 Kang Yusi1,2 Wei Zhonglun1Feng Rui1 Liu Hua11State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics , Physics,Chinese Academy of Sciences,Changchun,Jilin 130031,China2Graduate University of Chinese Academy of Sciences,Beijing 100039,China |
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| Abstract: | The diameter of pinhole or fiber is a critical element that affects the precision of point diffraction interferometer (PDI). The dimension of the aperture is determined by variational accuracy of practical measurement. Based on the scalar diffraction theory,the deviation between diffraction wavefront and sphericity aroused by the dimensions of the aperture is simulated and analyzed. The results show the wavefront error of the optical system is about 0.07 nm peak-vally value (PV) when the numerical aperture ... |
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| Keywords: | optical testing point diffraction interferometer scalar diffraction diffraction wavefront error |
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