极坐标系统下进行直角坐标扫描的离子束抛光

 在离子束抛光设备研制过程中，离子源扫描运动方式的选择是很关键的，一般分为直角坐标方式扫描和极坐标方式扫描两种。根据两种扫描方式的特点，在极坐标系统下进行直角坐标扫描方式加工。该种方法采用直角坐标扫描方式下的驻留时间计算，算法相对简单。该种方法在极坐标系统下进行加工，同等情况下可加工圆形镜面的口径比直角坐标系统下更大些；而且离子源的可移动区域是一条直线，其余地方可以摆放其他设备，空间利用率较高。对这种新思路进行仿真分析，证实了其具有可行性。

Ion beam polishing with scanning mode of rectangular coordinates in polar coordinates system

In the developing process of ion beam polishing equipment, the choice of scanning mode of ion source is very important. Traditional scanning process has two different ways. One is the mode of rectangular coordinates and the other is the mode of polar coordinates. According to the features of rectangular coordinate system and polar coordinate system, ion beam polishing with scanning mode of rectangular coordinates can be implemented in polar coordinates system. This method takes dwell time algorithm in rectangular scanning mode, which is much more simple. And in the same circumstances, its machinable round mirror caliber in polar scanning mode is bigger than that in rectangular scanning mode. Movable area of ion source in the way of polar coordinates is a line. Its rest place can be put other things, so dimensional utilization rate is higher. According to the simulation analysis of this new method, its feasibility has been proved.