Raman scattering in mosaic silicon carbide films |
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| Authors: | I. G. Aksyanov M. E. Kompan I. V. Kul’kova |
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| Affiliation: | 1.Ioffe Physical-Technical Institute,Russian Academy of Sciences,St. Petersburg,Russia |
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| Abstract: | The Raman spectra of mosaic silicon carbide films grown on silicon substrates by solid-state epitaxy have been studied. The main polytypes forming the film material have been determined. It has been experimentally revealed that the properties of the silicon carbide film are changed after an aluminum nitride film is deposited on the former film. This has been interpreted as a manifestation of good damping properties of the SiC film when layers of other semiconductors are grown on it. |
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