Analysis of a static scheme of ellipsometric measurements

The specific features of the operation of a static photometric scheme of an ellipsometer are considered. Different configurations (combinations of the azimuths of optical elements) are analyzed; formulas for the calculation of the ellipsometric parameters are obtained; and, for each configuration under consideration, ranges of the unambiguous determination of these parameters are ascertained. The effect of different imperfections on the measurement accuracy of the parameters Ψ and Δ is analyzed and the possibility of a correct consideration of these imperfections is demonstrated. Methods for determining the parameters of the phase-shifting elements of the optical path are proposed. The measurement errors of the ellipsometric parameters due to inaccurate specification of the phase shifts of the compensator and the turning prism, as well as the adjustment errors of the optical elements, are determined.