The detection of oxygen in magneto-optical layers with SIMS

The detection of oxygen in magneto-optical layers is of fundamental importance for the characterization of the stability of RE-TM material. The magnetic properties are directly influenced by oxide formation. Oxygen depth profiles are carried out by using the SIMS technique. A comparison with magnetic measurements showed a clear conformity. We were able to study the oxidation behaviour of various layers at room temperature and at higher values up to 250° C for several hours. It could be shown that aluminum is a successful material for the protection of RE-films against oxidation. The difficulties of translating SIMS counting rates into concentration values were overcome by using EPMA. Specially prepared reference samples were measured by this technique and could then be used as standard samples for SIMS.