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Ultrashort pulse laser ablation of silicon: an MD simulation study |
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| Authors: | R.F.W. Herrmann J. Gerlach E.E.B. Campbell |
| Affiliation: | (1) Max-Born Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Postfach 1107, D-12474 Berlin-Adlershof, Germany (Fax: +49 30 6392 1229, E-mail: campbell@mbi.fta-berlin.de), DE;(2) GMD-FIRST, Rudower Chaussee 5, 12489 Berlin-Adlershof, Germany, DE |
| Abstract: | Received: 30 July 1997/Accepted: 5 August 1997 |
| Keywords: | PACS: 79.20.Ds 61.80.Az |
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