Laser printing of multi-layered polymer/metal heterostructures for electronic and MEMS devices

A laser forward transfer technique for the simultaneous printing of polymer/metal stacked micro-laminates is introduced. Several different material combinations as well as stacking architectures are presented including single laser pulse deposited dual layer capacitors, three-layer stacks for potentially printing organic thin-film transistors (OTFTs), and photo-definable polymer/metal laminates and free-standing membranes for MEMS based sensors.