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Molecular depth profiling of organic and biological materials
Authors:John S. Fletcher  Xavier A. Conlan  Nicholas P. Lockyer  John C. Vickerman
Affiliation:Surface Analysis Research Centre, School of Chemical Engineering and Analytical Science, The University of Manchester, Manchester M60 1QD, UK
Abstract:Atomic depth profiling using secondary ion mass spectrometry, SIMS, is common in the field micro-electronics; however, the generation of molecular information as a function of sample depth is difficult due to the accumulation of damage both on and beneath the sample surface. The introduction of polyatomic ion beams such as SF5 and C60 have raised the possibility of overcoming this problem as they deposit the majority of their energy in the upper surface of the sample resulting in increased sputter yields but with a complimentary reduction in sub-surface damage accumulation. In this paper we report the depth profile analysis of the bio-polymer polycaprolactone, PCL, using the polyatomic ions View the MathML source and View the MathML source and the monoatomic Au+. Results are compared to recent analysis of a similar sample using View the MathML source. View the MathML source depth profiling of cellulose is also demonstrated, an experiment that has been reported as unsuccessful when attempted with View the MathML source implications for biological analysis are discussed.
Keywords:ToF-SIMS   Polyatomic ion beams   Molecular depth profiling
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