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Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films |
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| Authors: | M. Fried P. Petrik T. Lohner C. Schneider |
| Affiliation: | a Research Institute for Technical Physics and Materials Science (MFA), Konkoly Thege Miklós ut 29-33, H-1121 Budapest, Hungary b Fraunhofer Institute of Integrated Systems and Device Technology (IISB), Schottkystrasse 10, 91058 Erlangen, Germany c Chair of Electron Devices (LEB), University of Erlangen-Nuremberg, Cauerstrasse 6, 91058 Erlangen, Germany |
| Abstract: | Metal-organic chemical vapor deposition (MOCVD) made layers of strontium-bismuth-tantalate (SBT) were characterized by spectroscopic ellipsometry (SE) using the Adachi model [S. Adachi, Phys. Rev. B 35 (1987) 7454-7463]. The evaluated optical parameters were correlated with the physical and chemical behavior examined by X-ray diffraction (XRD).As a result, it was possible to fit the measured spectra with the Adachi model in a wide range covering the region of the band gap. The Adachi model provides electronic layer parameters like the transition energy E0 and broadening Γ. Our investigations established a correlation between XRD-determined average grain size and the electronic layer parameters. |
| Keywords: | Spectroscopic ellipsometry X-ray diffraction Grain size Ferroelectric materials |
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