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Static ToF-SIMS analysis of plasma chemically deposited ethylene/allyl alcohol co-polymer films
Authors:U Oran  S Swaraj  JF Friedrich  WES Unger
Institution:Thin Film and Surface Analysis WG, Bundesanstalt für Materialforschung - und prüfung (BAM), Unter den Eichen 44-46, D-12203 Berlin, Germany
Abstract:A plasma co-polymerization of ethylene as a “chain extending” monomer and allyl alcohol as a carrier monomer for hydroxyl groups was studied. The composition of the feed gas was systematically varied and the plasma co-polymers were analyzed in terms of their relative concentrations of OH functional groups by static Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) immediately after their preparation without any air contact, i.e., under so called “in situ” conditions.The relative OH group concentration involved in the -CH2-OH groups was derived from the normalized yields of the CH3O+ secondary fragment ion. The density of functional groups in the plasma co-polymers was found to vary non-linearly with respect to the mole percentage of the monomers in the feed gas.Co-polymerization phenomena, i.e. chemical interactions and recombination reactions taking place between monomer molecules in the plasma and/or during the deposition process, become evident in ToF-SIMS spectra.
Keywords:Plasma deposition  ToF-SIMS  Plasma co-polymerization  Ethylene  Allyl alcohol
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