Influence of Cr interlayer on the structure and optical properties of Ag films on glass substrate by magnetron sputtering |
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Authors: | Sun Xilian Shao Jianda |
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Institution: | Chinese Academy of Sciences, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China |
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Abstract: | Optical properties and microstructure of Ag film on glass substrate with Cr intermediate layer were studied by using spectrophotometer and XRD. The spectra results showed that introducing Cr intermediate layer reduced the surface roughness and promoted the reflectivity of Ag film. The XRD analysis showed that the crystalline grains increased and the stress decreased. The adhesion was also improved by using the tape test method. |
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Keywords: | 42 70&minus a 81 07&minus b |
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