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Mechanical properties an undercut evaluated resonance test and of silicon nanobeams with by combining the dynamic finite element analysis |
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| Affiliation: | [1]Jiangsu Key Laboratory of Meteorological Observation and Information Processing, Nanjing University of Information Science & Technology, Nanjing 210044, China; [2]College of Electronic gz Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China; [3]College of Physics & Opto-Electronic Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China |
| Abstract: | silicon nanobeams with undercut, mechanical properties, mechanical testing, finite element method |
| Keywords: | silicon nanobeams with undercut mechanical properties mechanical testing finite element method |
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