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Influence of ignition condition on the growth of silicon thin films using plasma enhanced chemical vapour deposition |
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| Authors: | Zhang Hai-Long Liu Feng-Zhen Zhu Mei-Fang and Liu Jin-Long |
| Affiliation: | Graduate University of Chinese Academy of Sciences, Beijing 100049, China |
| Abstract: | |
| Keywords: | plasma enhanced chemical vapour deposition microcrystalline silicon ignition condition |
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