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| Effects of underlayer materials and substrate temperatures on the structural and magnetic properties of Nd2Fe14B films | |
| 引用本文： | 马云贵,杨正,M. Matsumoto,A. Morisako,S. Takei. Effects of underlayer materials and substrate temperatures on the structural and magnetic properties of Nd2Fe14B films[J]. 中国物理, 2004, 13(11): 1969-1974 |
| 作者姓名： | 马云贵 杨正 M. Matsumoto A. Morisako S. Takei |
| 作者单位： | Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China;Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China;Department of Information Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan;Department of Information Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan;Department of Information Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan |
| 摘 要： | Thin films of Nd_2Fe_{14}B were fabricated on heated glass substrates by dc magnetron sputtering. Different material underlayers (Ta, Mo, or W) were used to examine the underlayer influence on the structural and magnetic properties of the NdFeB films. Deposited on a Ta buffer layer at 420℃, the 300 nm thick NdFeB films were shown to be isotropic. But when the substrate temperature T_s was elevated to 520℃, the Nd_2Fe_{14}B crystallites of (00l) plane were epitaxially grown on Ta (110) underlayer. In contrast, Mo (110) buffer layer could not induce any preferential orientation in NdFeB film irrespective of the substrate temperature or film thickness. The W buffer layer was found to be most effective for the nucleation of Nd_2Fe_{14}B crystallites with c-axis alignment perpendicular to the film plane when T_s<490℃. But at T_s=490℃ the magnetic layer became isotropic. The maximum coercivity obtained was about 995 kA/m for the 100nm film deposited on W underlayer at 490℃. These variations were tentatively explained in terms of the lattice misfit between the underlayer and the magnetic layer, combined with the considerations of underlayer morphologies. |
| 关 键 词： | 感光材料 底层 质地结构 感光温度 |
| 收稿时间： | 2003-12-18 |
Effects of underlayer materials and substrate temperatures on the structural and magnetic properties of Nd2Fe14B films |
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| Ma Yun-Gui,Yang Zheng,M. Matsumoto,A. Morisako and S. Takei. Effects of underlayer materials and substrate temperatures on the structural and magnetic properties of Nd2Fe14B films[J]. Chinese Physics, 2004, 13(11): 1969-1974 | |
| Authors: | Ma Yun-Gui Yang Zheng M. Matsumoto A. Morisako S. Takei |
| Affiliation: | Department of Information Engineering, Shinshu University, 4-17-1 Wakasato, Nagano 380-8553, Japan; Research Institute of Magnetic Materials, Lanzhou University, Lanzhou 730000, China |
| Abstract: | Thin films of Nd_2Fe_{14}B were fabricated on heated glass substrates by dc magnetron sputtering. Different material underlayers (Ta, Mo, or W) were used to examine the underlayer influence on the structural and magnetic properties of the NdFeB films. Deposited on a Ta buffer layer at 420℃, the 300 nm thick NdFeB films were shown to be isotropic. But when the substrate temperature T_s was elevated to 520℃, the Nd_2Fe_{14}B crystallites of (00l) plane were epitaxially grown on Ta (110) underlayer. In contrast, Mo (110) buffer layer could not induce any preferential orientation in NdFeB film irrespective of the substrate temperature or film thickness. The W buffer layer was found to be most effective for the nucleation of Nd_2Fe_{14}B crystallites with c-axis alignment perpendicular to the film plane when T_s<490℃. But at T_s=490℃ the magnetic layer became isotropic. The maximum coercivity obtained was about 995 kA/m for the 100nm film deposited on W underlayer at 490℃. These variations were tentatively explained in terms of the lattice misfit between the underlayer and the magnetic layer, combined with the considerations of underlayer morphologies. |
| Keywords: | Nd2Fe14B film underlayer substrate temperature texture |
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