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PET表面的碳氟等离子体处理改性层组分的变角XPS分析
引用本文:张亮,毛坤元,张新生,王建祺.PET表面的碳氟等离子体处理改性层组分的变角XPS分析[J].高等学校化学学报,1999,20(10):1605-1608.
作者姓名:张亮  毛坤元  张新生  王建祺
作者单位:1. 新加坡国立大学化学系, 新加坡 119260; 2. 美国尼高力仪器公司北京代表处, 北京 100020; 3. 北京教育学院宣武分院, 北京 100050; 4. 北京理工大学化工与材料学院, 北京 100081
基金项目:国家教育委员会高等学校博士点专项基金
摘    要:采用CH4/CF4混合气体等离子体来处理PET表面.利用变角XPS研究改性后PET的表面改性层的组分随取样深度的变化.结果表明,碳氟混合气体等离子体在PET表面形成交联网络结构的改性层,改性层的化学组成随深度的变化不大;纯CF4等离子体的改性层的化学组成不均匀,含氟基团主要分布在外面.不同混合气体等离子体在PET表面形成改性层的结构决定于CH4的添加量.

关 键 词:CH4/CF4等离子体  PET  变角XPS  表面改性  深度剖析  
收稿时间:1998-11-23

Analysis of the Compositions on PET Surface Layer Modified by Fluorocarbon Plasmas with Angle-dependent XPS Technique
ZHANG Liang,MAO Kun-Yuan,ZHANG Xin-sheng,WANG Jian-Qi.Analysis of the Compositions on PET Surface Layer Modified by Fluorocarbon Plasmas with Angle-dependent XPS Technique[J].Chemical Research In Chinese Universities,1999,20(10):1605-1608.
Authors:ZHANG Liang  MAO Kun-Yuan  ZHANG Xin-sheng  WANG Jian-Qi
Institution:1. Department of chemistry, National University of singapoere, 10 Kent Ridge Crescent, Singapore 119260; 2. Beijing Representative Office, Nicolet Insrtument Corporation, Beijin 100020; 3. Beijing Education College at Xuanwu District, Beijing 100050, China; 4. School of Chemical Engineering & Materials Science, Beijing Institute of Technology, Beijing 100081, China
Abstract:The surface of PET was modified by fluorocarbon plasmas.Angle\|dependent XPS technique was employed to study the surface structure and compositions of the modified layer on PET surface. It was found that the homogeneous, cross\|linking modified layer on PET surface can be formed by CH\-4/CF\-4 plasmas, and their composition change a bit with the increase of the sampling depth of XPS. However, for pure CF\-4 plasma, the modified layer is heterogeneous, and the amount of the fluorine\|containing groups on the outmost modified layers is more than that in the inner layer. The structures of the modified layer on the modified PET surface depend on the molar amount of CH\-4. The relationship between the compositions of the modified layers and the sampling depth will be discussed in details in this paper.
Keywords:PET
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