一种基于激光直写的水浊度传感结构

提出并制作了一种基于激光照射改变折射率方法的光度比浊度传感单元，综合了导波光学及检测相关知识原理.以UV光敏树脂为基底材料，采用“气体干法”除胶及分步固化的方法获得了该芯片化结构.传感器整个制作过程仅仅需要7~8 min因而使本方法具有很高的效率.由直写成型的单元组建传感系统对标准悬浊液样品进行了实验测试，所得的相关数据在SISO算法神经元网络系统中进行处理，获得了传感器浊度与对应散射系数的关系曲线.通过试剂检验的方法得知实际相对误差在5%左右.

Laser Direct Writing Based on Turbidity Sensor Structure

A design of ratio turbidity sensor fabricated by laser refractive index modulation is proposed and tested. Both waveguide theory and detecting knowledge are combined. The turbidity sensing structure is made from UV curable optical polymer and a special “airing dry method” is used to dispose the unexposed part. The whole progress only takes 7~8 minutes and thus this method can greatly promote fabrication efficiency. Experimental test is conducted by using standard turbidity solutions, and the related data are processed with a SISO algorithm neural network system. The results curves are obtained for scattering coefficient and turbidity of the standards,which proves that the sensor system has a relative error rate of 5%.