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| 利用调整技术补偿离轴抛物面反射镜面形误差 | |
| 引用本文： | 陈钦芳,李英才,马臻,李旭阳,郭永祥.利用调整技术补偿离轴抛物面反射镜面形误差[J].光子学报,2014,39(9):1578-1581. |
| 作者姓名： | 陈钦芳 李英才 马臻 李旭阳 郭永祥 |
| 作者单位： | (1 中国科学院西安光学精密机械研究所,西安 710119) (2 中国科学院研究生院,北京 100049) |
| 摘 要： | 为了提高光学系统的成像质量,对离轴抛物面反射镜的面形准确度要求越来越高,这大大增加了反射镜的加工难度.本文基于波像差理论,分析了在离轴抛物面反射镜中调整量引入的波像差,提出通过适当调整离轴抛物面反射镜的位置补偿反射镜的面形误差,可以降低离轴反射镜的加工难度、缩短其加工周期、减少加工成本.并借助于ZEMAX软件对一块面形准确度低于λ/40 RMS (λ=632.8 nm)离轴抛物面反射镜进行仿真实验,根据理论计算的调整量调整反射镜的位置,得到了补偿后的离轴抛物面反射镜的面形误差小于λ/60 RMS,仿真结果表明在离轴抛物面反射镜中引入适当的调整量可以有效地补偿反射镜的面形误差. |
| 关 键 词： | 非球面加工 面形误差 波像差 调整技术 离轴抛物面镜 |
| 收稿时间： | 2009-10-29 |
Surface Error Compensation of Off-axis Parabolic Mirrors by Alignment |
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| CHEN Qin-fang,LI Ying-cai,MA Zhen,LI Xu-yang,GUO Yong-xiang.Surface Error Compensation of Off-axis Parabolic Mirrors by Alignment[J].Acta Photonica Sinica,2014,39(9):1578-1581. | |
| Authors: | CHEN Qin-fang LI Ying-cai MA Zhen LI Xu-yang GUO Yong-xiang |
| Institution: | (1 Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi′an 710119,China) (2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China) |
| Abstract: | In order to improve the imaging quality of optical system,high precision surface of mirrors are put forward to improve their imaging quality. It makes their fabrication harder. Wavefront aberration induced by alignment is analyzed in off-axis parabolic mirror system based on the wavefront aberration theory. The surface error of off-axis parabolic mirror can be compensated by alignment so it will reduce the fabrication difficulty,shorten its period and save its cost. In the simulations of an off-axis parabolic mirror with surface error λ/40 RMS (λ=632.8 nm) ( Root Mean Squre) with ZEMAX software,the figure accuracy is under λ/40 RMS after alignment. It shows that surface error of off-axis parabolic mirrors could be compensated effectively by alignment. |
| Keywords: | Aspheric processing Surface error Wavefront Alignment Off-axis parabolic mirror |
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