光学元件干涉检测数据的定位处理方法

在光学元件的抛光阶段,通常采用干涉仪对光学元件的面形数据进行检测,为进一步的加工工作提供指导意见.为了利用干涉仪检测数据给出被测光学元件面形上的各点空间坐标准确位置,对面形数据的原始数据做二值化处理,用Sobel算子采用基于边缘检测的方法准确提取光学元件的外形轮廓数据,采用基于半径约束的最小二乘拟合方法对被测光学元件的内、外圆边缘数据进行多次处理,求取内、外圆的圆心位置,半径大小,根据等准确度测量原则获得光学元件面形数据的准确值,为在干涉仪检测所得面形数据上准确建立坐标系提供依据.

Research on the Interferogram Processing Method of Optical Surfaces

 Interferometers are used to test the surface shape data of optical component for further processing to provide guidance.Various spatial point on the tested optical component are given by interferogram analysis.The binary image is get from the raw data,then the edge of optical component is differentiated with a sobel exactly.A coefficient constraint condition is incorporated into the least squares method for geometric parameters of circles,and the location of the centre of the circle and the size of the radius will be calculated by the method.Various spatial points on the tested optical component are given by calculation method,and arithmetic average value of equal precision is provied.The coordinate of the interferogram can be established exactly.